| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump and a regeneration method thereof capable of shortening the regeneration time by vaporizing residual water inside of a cryopump from a liquid condition without solidifying it and exhausting it in a regeneration process. SOLUTION: This cryopump comprises a pump vessel 14, cryopanels 16 and 18 to be cooled at a low temperature in vacuum-pumping, and a cooling machine 17, and performs vacuum-pumping by condensing various gas including water on the cryopanels. The cryopump reproducing method comprises a temperature raising step S12 of raising the temperature of the cryopanels to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step S17 of evacuating inside of the pump vessel, a determination step S18 of determining whether or not the internal pressure of the pump vessel has reached a set pressure higher than the water steam pressure at 0 degree centigrade (0°C), a pressure rise test step S20 of stopping the evacuation and performing a pressure rise test, and an observation step S21 of observing residual water based on the internal pressure of the pump vessel. COPYRIGHT: (C)2009,JPO&INPIT
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