| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchip which excels in productivity and has a structure, capable of easily determining groove collapse and in which a fine channel circuit pattern is formed in a substrate. SOLUTION: At least a first substrate, having a substrate surface provided with grooves, is pasted to a second substrate to form the microchip, and the microchip has a fluid circuit made of the grooves and a first substrate-side surface of the second substrate. In the first substrate, the surface provided with the grooves is provided with a collapse-measuring part for measuring groove destructions due to the pasting of the first substrate and the second substrate. The collapse-measuring part is provided with at least both a reference groove, having a depth which is equal to or deeper than the shallowest groove forming the fluid circuit in the thickness direction of the first substrate and a protrusion part in the shape of a pyramid, a cone, or a triangular prism mounted to the inside of the reference groove and having a measuring surface sloped in the direction of the surface of the second substrate. COPYRIGHT: (C)2009,JPO&INPIT
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