发明名称 |
Foil trap and extreme ultraviolet light source device using the foil trap |
摘要 |
<p>An extreme ultraviolet (EUV) light source device and foil trap (15), the device including a vessel; an EUV radiating species supply means that feeds an extreme ultraviolet radiating species into the vessel; a discharge part with discharge electrodes (4,5) that heat and excite the EUV radiating species and generate a high-temperature plasma (8); a collector mirror (13) collecting EUV radiation emitted from the plasma; the foil trap installed between the discharge part and the mirror; an extractor part extracting the collected radiation; and an evacuation means exhausting and regulating pressure within the vessel. The foil trap includes foils extending radially from a main axis thereof to capture debris from the light source, while allowing the emitted radiation to pass through a region thereof to the mirror. A length of at least part of the foils in directions parallel to the main axis is shorter in positions close to the main axis than distant therefrom.
</p> |
申请公布号 |
EP1972999(A3) |
申请公布日期 |
2009.07.15 |
申请号 |
EP20080003664 |
申请日期 |
2008.02.28 |
申请人 |
USHIODENKI KABUSHIKI KAISHA |
发明人 |
SHIRAI, TAKAHIRO;INOUE, TAKAHIRO |
分类号 |
G03F7/20;H05G2/00 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|