DEVICE FOR CONTROLLING HIGH VOLTAGE HAVING CAPACITIVE LOAD PROPERTY

摘要

A resonant type high voltage controlling device with a capacitive load characteristic is provided to prevent a perturbation phenomenon by securing stability of the output voltage control by implementing a hybrid structure mixing a pulse width modulation method and a pulse frequency modulation method. An inverter(300) modulates a DC voltage to an AC pulse voltage. A resonant reactor(400) is positioned in the rear of the inverter and performs load matching of the plasma reactor. A transformer(600) boosts the output voltage of the inverter and applies the boosted voltage to the plasma reactor. A controller(800) detects the output current of the resonant reactor and the primary voltage of the transformer. The controller forms a control signal with a pulse frequency modulation control method until the output voltage of the plasma reactor reaches the pulse frequency modulation reference voltage. The controller forms the control signal with the pulse width modulation method when the output voltage of the plasma reactor reaches the pulse frequency modulation reference voltage. The controller maintains the output voltage of the plasma reactor constantly.