EVALUATION METHOD, CONTROL METHOD, EXPOSURE APPARATUS, AND MEMORY MEDIUM

摘要

A method for evaluating, control method, light exposure apparatus, and memory medium are provided to improve the efficiency of control of a transparent optical system based on the evaluation result of the optical system. A method for evaluating the function of transparent optical system on a substrate comprises: a step (S32) of specifying the variation of polarized light of the optical system which indicates the relation between the states of polarized light; a step of calculating (S34) parameter having relation with the variation of polarized light; and a step (S36) of calculating the value having the function of transparent optical system.