| 摘要 |
<p>An alignment key of a semiconductor device and a method for measuring alignment are provided to accurately measure alignment by using undamaged unit alignment key patterns. An alignment key of a semiconductor device includes at least two unit alignment key patterns(311,312,313,321,322,323). The unit alignment key patterns are arranged at a scribe region of a semiconductor substrate. The unit alignment key patterns have constant lengths and widths. The unit alignment key patterns are arranged to be shifted at a regular interval.</p> |
