ENHANCED STRUCTURAL, ELECTRICAL AND OPTICAL CHARACTERISTICS WITH LITHIUM - ZINC OXIDE THIN FILM AND DORF THE MANUFACTURING METHODS

摘要

A lithium doped oxidation zinc thin film and a manufacturing method thereof are provided to easily and repeatedly produce ZnO thin film of high quality by doping Li ions into ZnO under a constant condition through a pulsed laser deposition method. In order to obtain a desired amount of lithium dopant within ZnO powder of high purity, lithium oxide powder of high purity is mixed with ZnO powder at a flat rate. A target is obtained by pressing the mixture into a specific shape. The obtained target is sintered at a constant temperature. The energy density of an excimer laser is regularly set up. A corroded material is deposited onto a substrate of the target under a specific condition.