Coating Film Forming Apparatus

摘要

The present invention is directed to a coating film forming apparatus 1. The apparatus 1 includes a coating unit 11, a coating material supply unit 10, and a control unit 12. The coating unit 11 contains a holding unit 18 for holding a substrate 4, a coating nozzle 19, and a movable unit 20. The coating nozzle 19 is provided with a slit for discharge coating material to an inner circumferential surface, formed in annular shape. The movable unit 20 moves the coating nozzle 19 along a shaft center P of the substrate 4. The control unit 12 controls to apply coating material 7 to an outer circumferential surface 4c of the substrate 4 from a lower end 4a upward in order.