| 摘要 |
The present inventive (Li, Na, K)(Nb, Ta, Sb)O 3 based piezoelectric material has a sintered body having a surface microstructure comprises microscopic grains having a grain diameter of less than 5 µm, intermediate grains having a grain diameter of 5 µm or more and less than 15 µm, and coarse grains having a grain diameter of 15 µm or more and 50 µm or less, wherein the amount of coarse grains is 3% or more in a share of grains in terms of area. The present piezoelectric material can be manufactured by mixing metal-containing compounds so as to give the above-mentioned formulation, calcining the mixture and then crushing the resultant to obtain a calcined/crushed powder, then keeping temperature constantly at a temperature within a range from 800 to 950°C for a predetermined period of time in a constant temperature keeping process, and raising temperature to firing temperature for sintering. |
