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发明名称
Ion implantation ion source
摘要
申请公布号
EP1675154(A3)
申请公布日期
2009.07.15
申请号
EP20060000133
申请日期
2000.12.13
申请人
SEMEQUIP, INC.
发明人
HORSKY, THOMAS N.
分类号
H01J37/08;H01J27/08;H01J37/317
主分类号
H01J37/08
代理机构
代理人
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