ATMOSPHERE PLASMA SURFACE-TREATED AZO THIN FILM AND ITS MANUFACTURING METHOD

摘要

An atmospheric pressure plasma surface-treated AZO thin film and a manufacturing method thereof are provided to achieve simple and economic procedure by performing a plasma surface treatment under an atmospheric pressure. Reactive gas is supplied to a plasma generating device under an atmospheric pressure. The reactive gas is made from by adding oxygen to any one of argon, helium and nitrogen. Plasma is generated by applying AC power to the plasma generating device. ZnO thin film doped with Al is positioned into a plasma generating area. The surface of the AZO thin film is reformed.