发明名称 |
Flowmeter with silicon flow tube |
摘要 |
A flowmeter comprising a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, said tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.
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申请公布号 |
EP2078936(A1) |
申请公布日期 |
2009.07.15 |
申请号 |
EP20080075910 |
申请日期 |
2008.12.02 |
申请人 |
BERKIN B.V. |
发明人 |
LAMMERINK, THEODORUS SIMON JOSEF;DIJKSTRA, MARCEL;HANEVELD, JEROEN;WIEGERINK, REMCO JOHN |
分类号 |
G01F1/84;G01F1/684;G01F1/688 |
主分类号 |
G01F1/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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