发明名称 |
VERFAHREN ZUR STRUKTURIERUNG EINES SUBSTRATS UND VORRICHTUNG HIERZU |
摘要 |
The invention relates to a method for structuring a substrate. According to said method, at least one mask with at least one opening is arranged over the substrate, and unmasked regions are modified in relation to masked regions of the substrate in order to form structures. The inventive method is characterised in that the representation of the mask opening on and/or in the substrate has smaller dimensions than those of the actual mask opening. The invention also relates to a device for carrying out said method. |
申请公布号 |
AT434775(T) |
申请公布日期 |
2009.07.15 |
申请号 |
AT20050769575T |
申请日期 |
2005.07.27 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
SZOT, KRYSZTOF;PETER, FRANK;REICHENBERG, BERND |
分类号 |
G03F7/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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