发明名称 Method for calculating a model spectrum
摘要 With technical surfaces, in particular in semiconductor manufacture, it is a regular requirement to determine the reflection coefficient. For this purpose, a model spectrum of an object of a plurality of wavelengths and a defined number of intermediate points is calculated. To increase the calculating speed, the defined number of intermediate points is calculated prior to the execution of the calculation.
申请公布号 US7561984(B2) 申请公布日期 2009.07.14
申请号 US20070655984 申请日期 2007.01.22
申请人 VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH 发明人 HALM CHRISTIAN
分类号 G06F19/00 主分类号 G06F19/00
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