| 摘要 |
An apparatus having a plurality of coils (e.g., numerous thin-film coils formed in an array on a flex circuit), each coil acting as an excitation unit that generates an alternating excitation magnetic signal; and as a sensor configured to detect an eddy-current signal's phase and amplitude changes relative to the excitation magnetic signal. In some embodiments, the apparatus electronically scans a surface (e.g., of a metal plate) by successively switching to individual ones of the plurality of excitation/sensing coils (using, e.g., an analog multiplexer) without physical movement in order to detect anomalous signal changes in a manner that reduces signal changes due to probe lift-off relative to the surface. In some embodiments, the coils are placed across a large area of interest, for inspection of a large surface area in a few seconds without moving the apparatus. This can provide high-sensitivity detection and an accurate indication of flaw locations.
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