发明名称 Interferometer using integrated retarders to reduce physical volume
摘要 An apparatus includes an interferometer having a polarizing beam splitter to split an input beam into a measurement beam and a reference beam, the measurement beam contacting a measurement object, the reference beam contacting a reference object. The interferometer includes at least one thin retarder on a surface of the interferometer.
申请公布号 US7561278(B2) 申请公布日期 2009.07.14
申请号 US20060582869 申请日期 2006.10.18
申请人 ZYGO CORPORATION 发明人 CARLSON ANDREW ERIC
分类号 G01B9/02;G01B11/02 主分类号 G01B9/02
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