SPACE TRANSFORMER HAVING ISOLATION RESISTOR FOR PROBE CARD AND METHOD OF MANUFACTURING SPACE TRANSFORBER

摘要

A space transformer having isolation resistor for probe card and method of manufacturing space transformer are provided to easily secure the space for arranging the isolation resistor. The register for an isolation resistor(20) is printed on the ceramic sheet(11). The other ceramic sheet(12) is laminated on the ceramic sheet in which the register is printed. At this time, the register is arranged between ceramic sheets. The laminated ceramic sheet is sintered. The via hole(31) is formed in the ceramic sheet. Via holes are filled in the register.