发明名称 Optical microscope and spectrum measuring method
摘要 An optical microscope according to a first embodiment of the present invention includes: a laser light source; a Y-directional scanning unit moving the light beam in a Y direction; an objective lens; a X-directional scanning unit moving the light beam in a X direction; a beam splitter provided in an optical path from the Y-directional scanning unit to the sample, and separating outgoing light out of the light beam incident on the sample, which exits from the sample toward the objective lens from the light beam incident on the sample from the laser light source; a spectroscope having an entrance slit extending along the Y direction and spatially dispersing the outgoing light passed through the entrance slit in accordance with a wavelength of the light; and a detector detecting the outgoing light dispersed by the spectroscope.
申请公布号 US7561265(B2) 申请公布日期 2009.07.14
申请号 US20060607491 申请日期 2006.12.01
申请人 NANOPHOTON CORP. 发明人 KOBAYASHI MINORU;OTA TAISUKE;ODE TAKAHIRO
分类号 G01J3/30 主分类号 G01J3/30
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