发明名称 Fin PIN diode
摘要 Embodiments of the invention generally relate to the field of semiconductor devices, and more specifically to fin-based junction diodes. A portion of a doped semiconductor fin may protrude through a first doped layer. An intrinsic layer may be disposed on the protruding semiconductor fin. A second semiconductor layer may be disposed on the intrinsic layer, thereby forming a PIN diode compatible with FinFET technology and having increased junction area.
申请公布号 US7560784(B2) 申请公布日期 2009.07.14
申请号 US20070669970 申请日期 2007.02.01
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG KANGGUO;HSU LOUIS LU-CHEN;MANDELMAN JACK ALLAN
分类号 H01L29/76 主分类号 H01L29/76
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