发明名称 METHOD AND APPARATUS FOR COATING A SOLUTION ONTO A SUBSTRATE
摘要 The invention relates to an apparatus and a method of using the apparatus fo r applying a substantially uniform coating of solution onto a substrate. The apparatus includes a substrate support having a compressibl e surface. Coating is performed using a meyer rod. Uniform force is applied to the meyer rod using a weight placed on top of the meyer rod.
申请公布号 CA2328864(C) 申请公布日期 2009.07.14
申请号 CA19992328864 申请日期 1999.03.19
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 PRINCIPE, FRANK SANTO;INNOCENZO, JEFFREY GLENN
分类号 B05C11/02;G03F7/16;B05D3/00;G03F3/10 主分类号 B05C11/02
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