EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE AND WAFER LOADING/UNLOADING METHOD USED THE SAME

摘要

A semiconductor manufacturing facility and wafer loading/unloading method are provided, which can increase the productivity by loading a plurality of wafers on a boat to the maximum. The reaction tube is formed in order to have the bell. The plate(130) is formed in order to seal the lower part of the reaction tube hermetically. The reacting gas providing unit supplies the reaction gas into the reaction tube. The reaction gas discharge unit discharges the reaction gas supplied to the reaction tube. The first boat(140) supports the bottom of a plurality of wafers on the plate. The second boat(150) is formed in order to support the top of a plurality of wafers.