CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP

摘要

A cryotrap (1) is placed in a vacuum container (3) and has an exhaust panel (7) for cooling gas to condense it and exhausting the condensed gas, and also has a cooling stage (5) connected to a refrigeration machine (2) and cooled. The cryotrap (1) is further provided with a cold storage body (6) held in thermal contact with the cooling stage (5) and fixedly placed, and with a mechanism for thermally connecting and disconnecting between the cold storage body (6) and the exhaust panel (7). The mechanism for the thermal connection and disconnection has a highly thermally conductive movable section capable of being in contact with and separated from the exhaust panel (7) and the cold storage body (6).