APPARATUS FOR PREVENTING SURFACE DAMAGE IN LASER SHOCK WAVE CLEANING PROCESS AND MASK THEREOF

摘要

An apparatus for preventing surface damage in laser shock wave cleaning process and mask thereof are provided to prevent the surface damage of the object from being cleaned due to a plasma thermal line by reflecting or adsorbing a plasma thermal line generated by a plasma shock wave. The apparatus for preventing surface damage comprises a mask part(21), and a mask driving part(32) part and a power supply part(34). The mask part is interposed in the space between the surface of the object to be cleaned and the laser focus location. The mask part reflects and absorbs a plasma thermal line accompanied with the plasma shock wave. The mask driving part runs the mask part and reduces the damage of the mask part due to the plasma thermal line.