| 摘要 |
<p>A fluid delivery system includes a flow control device and a Coriolis mass flowmeter(112) in fluid communication with the flow control device.(110).The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller (114)provides a control output signal to the flow control device(110), which may comprise a pinch valve(120), so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.(112).</p> |
