发明名称 Piezoelectric element and its manufacturing method
摘要 A piezoelectric element includes: a base substrate; a lower electrode provided above the base substrate; a lower dummy electrode provided on the base substrate and electrically insulated from the lower electrode; a piezoelectric layer provided on the base substrate, the lower electrode and the lower dummy electrode; and an upper electrode provided on the piezoelectric layer.
申请公布号 US7560854(B2) 申请公布日期 2009.07.14
申请号 US20080075976 申请日期 2008.03.13
申请人 SEIKO EPSON CORPORATION 发明人 OHASHI KOJI;NAKAYAMA MASAO
分类号 B41J2/045 主分类号 B41J2/045
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