| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor switch such that an SPnT switch can be made broadband, compact and low-cost. <P>SOLUTION: In the case of an SP4T switch, for example, a wiring line 2<SB>10</SB>connected to one first terminal is branched into four wiring lines 2<SB>11</SB>to 2<SB>14</SB>from a branch point A at the other end on a semiconductor substrate, and four FETs 4<SB>1</SB>to 4<SB>4</SB>having the other-side ends of the wiring lines 2<SB>11</SB>to 2<SB>14</SB>connected to sources or drains have a configuration such that the drains or sources as the other-side terminals of the FETs 4<SB>1</SB>to 4<SB>4</SB>are connected to four second terminals through the wiring lines 2<SB>21</SB>to 2<SB>24</SB>. At this time, FETs to be farther from the branch point A at the other end of the wiring line 210 among the four FETs 4<SB>1</SB>to 4<SB>4</SB>are disposed closer to the branch point A at the other end of the wiring line 2<SB>10</SB>to equalize the four wiring lines 2<SB>11</SB>to 2<SB>14</SB>in length to one another. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
