摘要 |
Described is a scanning microscope that includes at least two scanners disposed in series within an excitation beam, wherein one of the scanners is a two-axis galvanometer-controlled scanner, and the other of the scanners is a single-axis resonant scanner. The device may also include a spatial detection system disposed within the excitation beam at a point downstream of the at least two scanners, wherein the spatial detection system is configured to detect a sum of deflections generated by the at least two scanners, or to detect angular differences in the excitation beam when two or more illumination sources are used.
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