GAS SUPPLY STRUCTURE

摘要

A gas supply structure (100) is provided with a nozzle (10) having a gas supply path (12), and a receptacle (20) having an inserting hole (22) into which the nozzle (10) is inserted to be connected. The receptacle (20) is provided with a first O-ring (24) arranged at the vicinity of the inserting hole (22) for sealing, and a second O-ring (28) arranged in downstream of gas supply from the first O-ring (24) for sealing. The second O-ring (28) is connected to a recessed section of the receptacle (20) at one part by a bonding material (27), and a foreign material removing member (26) is arranged closer to the inserting hole (22) than the second O-ring (28). The foreign material removing member (26) is arranged on the receptacle (20) to be partially protruded from an inner circumference surface extending from the inserting hole (22) of the receptacle (20).