| 摘要 |
PROBLEM TO BE SOLVED: To provide a transport and storage mechanism of charged particles capable of preventing decrease of the quantity of axially discharged ions, even if the difference between potentials of poles is set large by keeping assembly accuracy of the poles. SOLUTION: This transport and storage mechanism of charged particles is equipped with a multipole electrode, comprising an even number of rod-like electrodes which are not smaller than four is structured, such that at least a pair of facing rod-like electrodes out of the rod-like electrodes have each a groove having a bottom of a depth inclined at a predetermined angle or in a gradual change, in a direction of separating from the center axis of the multipole electrode on a side facing the center axis of the multipole electrode toward the entrance side or the exit side of a space; a high-frequency voltage which increases/decreases in terms of a trigonometric function, a D.C. voltage for a mass filter function, an axial electric field forming D.C. voltage and an axial potential setting D.C. voltage are superimposed on one another and the superposed voltage is applied to the electrode having the groove; and the charged particles are accelerated from the upstream side to the downstream side of the multipole electrode by an electric field gradient which is axially formed by the axial electric field forming D.C. voltage. COPYRIGHT: (C)2009,JPO&INPIT |
