| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor wafer conveying container such that an attachment/detachment body in which a transponder is embedded is not detached unless it is intentionally detached using a tool etc., and unexpected trouble hardly occurs. SOLUTION: The semiconductor wafer conveying container 10 has a container body 11 for containing a semiconductor wafer 20, and the attachment/detachment body 12 in which the transponder 12a for reading and writing information associated with the semiconductor wafer 20 is embedded. A slide groove 11a for sliding and fitting the attachment/detachment body 12 formed in a column shape along the length is provided along a wall surface of the container body 11, and a ceiling portion 11b for covering a front end of the attachment/detachment body 12 fitted in the slide groove 11a is provided on the wall surface of the container body 11, thereby making it hard to press the front end of the attachment/detachment body 12 fitted in the slide groove 11a toward the rear end. COPYRIGHT: (C)2009,JPO&INPIT |
