| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact method and a contact device such that contact objects can be efficiently brought into contact with small errors in parallelism and torsion. SOLUTION: First and second reflectors 5 and 6 are disposed on first and second arrangement surfaces 2a and 3a, light 17A reflected when a side reflective surface 51b of the first reflector 5 is irradiated with first measurement light 17A from a measuring device 8 to adjust the attitude of the measuring device 8 on the basis of the photodetection position thereof, and a 45°reflective surface 51c of the first reflector 5 is irradiated with second measurement light 17B from the measuring device 8 and reflects the light on the reflective surface 51c, which is reflected by a parallel reflective surface 61b of the second reflector 6. Then light 17B reflected on the 45°reflective surface 51c is photodetected to adjust the parallelism between both the arrangement surfaces 2a and 3b on the basis of the photodetection position thereof; and a first substrate carrying a first contact object is disposed on the first arrangement surface 2a instead of the first reflector 5, and a second contact object is disposed on the second arrangement surface 3a instead of the second reflector 6, so that both the contact objects are brought into contact with each other and joined together. COPYRIGHT: (C)2009,JPO&INPIT
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