METHOD OF MAKING A PILLAR PATTERN USING TRIPLE OR QUADRUPLE EXPOSURE
摘要
Methods of making pillar shaped device array using a triple or quadruple exposure technique are described. A plurality of pillar shaped devices are formed arranged in a hexagonal or rectangular pattern.
申请公布号
WO2009085077(A1)
申请公布日期
2009.07.09
申请号
WO2008US12480
申请日期
2008.11.05
申请人
SANDISK 3D LLC;PETTI, CHRISTOPHER, J.;SCHEUERLEIN, ROY, E.
