发明名称 CARRYING DEVICE AND EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a carrying device capable of regulating a position in a width direction of a workpiece T at a place where the film-shaped workpiece T is loosened, and sending the workpiece without friction. <P>SOLUTION: The carrying device FE includes a supplying reel 2 around which the long film-shaped workpiece T of predetermined width is taken-up; a take-up reel 5 taking up the long film-shaped workpiece sent from the supplying reel; a first guide roller 32a and a second guide roller 32b disposed between the supplying reel and the take-up reel, and making the long film-shaped workpiece have a slackening area; and a rotating guide 21 disposed so as to intersect at least one end portion in the predetermined width direction of the workpiece which slackens the long film-shaped workpiece between the first guide roller and a second guide roller, and capable of rotating in a sending direction of the workpiece. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009149427(A) 申请公布日期 2009.07.09
申请号 JP20070330094 申请日期 2007.12.21
申请人 ORC MFG CO LTD 发明人 YAGI YASUHIKO;ISHINABE EIHIKO
分类号 B65H23/038;B65H20/24;B65H23/188;G03F7/20 主分类号 B65H23/038
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