| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pattern forming device which can shorten a time from the beginning of an exchanging operation of a sub-carriage to the arrangement of each carriage at a drawing position, and efficiently control temperature in a chamber. <P>SOLUTION: A partition wall 3 is installed which divides a chamber 2 of a droplet discharge device 1 into a first chamber Z1 and a second chamber Z2. The partition wall 3 is installed at a position allowing each carriage to reciprocate between the first chamber Z1 and the second chamber Z2 and allowing a weight measuring unit 54 and a first capping unit CU1 to be arranged in the second chamber Z2. When a first door D1 is unlocked, the carriages located in the first chamber and second to sixth capping units CU2-CU6 are stopped. Therefore, preparation of drawing, such as the initial charge of a functional liquid in the second chamber Z2 and the exchanging operation of the sub-carriage by an operator in the first chamber Z1 can be carried out at the same time. A space requiring temperature control is only the second chamber Z2, thereby enabling efficient temperature control. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
