| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding pad which can eliminate problems such as scratching during a grinding process, and at the same time can extend the replacing cycle thereof, and to provide a grinding pad manufacturing method, a grinding device, and a grinding method. <P>SOLUTION: The grinding pad 110a has a base layer 111, and a grinding layer 112 which is arranged on the base layer 111 and to which a grinding liquid is fed. The grinding layer 112 has first grooves 112a formed in a first surface (upper surface) opposite to the base layer 111 and second grooves 112b formed in a second surface (lower surface) of the base layer 111 side and appearing when the first layer is worn by a predetermined quantity. <P>COPYRIGHT: (C)2009,JPO&INPIT |
