| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alumina sintered compact lowering dielectric dissipation factor in the megahertz to gigahertz bands, and to provide a method for producing the same, a member for a semiconductor production apparatus, a member for a liquid-crystal panel production apparatus and a member for a dielectric resonator. <P>SOLUTION: The alumina sintered compact comprises at least ≥99.3 mass% aluminum in terms of Al<SB>2</SB>O<SB>3</SB>and other elements including silicon and strontium as elements, is constituted of alumina crystal grains 1 as main crystal grains, and has a crystal phase containing the elements Si, Al, Sr, and O at triple points 2 constituted of alumina crystal grains 1. The alumina sintered compact can retain the excellent corrosion resistance, mechanical properties, and electrical properties of alumina since the sintered compact contains ≥99.3 mass% aluminum in terms of Al<SB>2</SB>O<SB>3</SB>. In addition, since the crystal phase, comprising a compound containing the elements Si, Al, Sr, and O and having a low loss, is present at the triple points 2 constituted of alumina crystal grains 1, the alumina sintered compact can have a lower loss than conventional ones in the megahertz to gigahertz bands. <P>COPYRIGHT: (C)2009,JPO&INPIT |
