| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface lighting device, in particular, a device for lighting a mask for lithographic usage. <P>SOLUTION: The surface lighting device includes: at least one light source 1 for generating light 3 that is used for lighting; an optical means 2 for forming the light 3 generated by the at least one light source 1; and splitting means 4, 4', 4" capable of splitting the light 3 to be used for lighting into a plurality of separated partial beams 5, the partial beams configured to light an object surface at intervals. The present invention also discloses a device for allowing light to act on a work area. <P>COPYRIGHT: (C)2009,JPO&INPIT |
