| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device of a mask for packing particles with which particles clogged in an aperture part of the mask are efficiently removed without spoiling a substrate placing stage due to fall of the particles below the mask. SOLUTION: The cleaning device 11 of the mask 12 is used in a particle packing step for packing and disposing the particles in substrate spaces of an information display panel when the information display panel having a particle group including chargeable particles as a display medium is manufactured. The device includes: a brush device 16 disposed on the upper surface side of the mask and provided with a brush 15 functioning so that the tip part thereof may push out the particles 14 clogged in the aperture part 13; and a suction device 18 disposed on the lower surface side of the mask so as to be opposed to the brush of the brush device sandwiching the mask and functioning so as to suck the particles pushed out on the lower side of the mask by the brush of the brush device. COPYRIGHT: (C)2009,JPO&INPIT
|
