| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for measuring the position of an object to be measured capable of reducing detectable projection width of the object to be measured, and allowing wider size selectivity of the object to be measured. SOLUTION: In the system for measuring the position of the object to be measured by detection of photothermal energy comprising an object to be measured, a photo sensor and an optical system, the photo sensor is arranged opposing the object to be measured so that an array direction of rows or columns of a plurality of photo-detection device forms 45-degree angle with one direction of the object to be measured, and an outline of one direction of the object to be measured within a detection area of the photo sensor due to change of relative positional relationship between the photo sensor and the object to be measured is detected by tracking temperature difference with the periphery. COPYRIGHT: (C)2009,JPO&INPIT
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