| 摘要 |
PROBLEM TO BE SOLVED: To improve S/N ratio of received light data obtained by a photo sensor element. SOLUTION: A first photo sensor element 32a receives diffracted light diffracted by a diffraction grating part KK, and generates received light data. A position detection part 402 detects a position of a detection object based on the received light data generated by the photo sensor element. COPYRIGHT: (C)2009,JPO&INPIT |
