| 摘要 |
A device is described herein which may comprise an oscillator having an oscillator cavity length, L0, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined = (N + x) * L0, where "N" is an integer and "x" is a number between 0.4 and 0.6. |
| 申请人 |
CYMER, INC.;ERSHOV, ALEXANDER, I.;HOFFMAN, JERZY, R.;BOWERING, NORBERT, R.;BYKANOV, ALEXANDER, N. |
发明人 |
ERSHOV, ALEXANDER, I.;HOFFMAN, JERZY, R.;BOWERING, NORBERT, R.;BYKANOV, ALEXANDER, N. |
