| 摘要 |
The method of measuring a peripheral tilt angle in accordance with the present invention, to address the problems, is a method of measuring a peripheral tilt angle on an inspection object having surface mounds, the method including: the step A of projecting light onto the inspection object; the step B of sensing distribution of light reflected off the inspection object; the step C of obtaining a feature point of the distribution of the reflected light from result of the sensing of the distribution of the reflected light; and the step D of obtaining a peripheral tilt angle which is a tilt angle near a periphery of each of the surface mounds based on an angle of projection of the light in step A to a position which, on the inspection object, corresponds to the feature point and an angle of sensing of the reflected light in step B off a position which, on the inspection object, corresponds to the feature point. Thus, the invention provides a method whereby a peripheral tilt angle, or a tilt angle of a surface mound near its periphery on an inspection object is obtained and also provides a method whereby deviation in height of the surface mound is precisely inspected based on the peripheral tilt angle.
|
