| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dry gas generation apparatus not requiring a heater or the like for returning a gas with a lessened moisture content back to room temperature, configured to have compact layout as a whole, and realizing an energy saving design. <P>SOLUTION: The dry gas generation apparatus is for decreasing the water concentration of a gas supplied to a gas channel (a gas channel introduction part 32, an outward gas heat-exchange channel part 46, an inward gas heat-exchange channel part 47, ad gas channel outlet part 37) by a refrigerator 45. The refrigerator 45 comprises a low temperature part 22 to be a heat absorption part for lowering the temperature of the gas to a prescribed dew point or lower and a high temperature part 21 to be a heat emission part having a temperature higher than room temperature. The gas channel carries out heat exchange with the refrigerator 45 while being installed in a range between the high temperature part 21 and the low temperature part 22. Preferably, the range between the high temperature part 21 and the low temperature part 22 of the gas channel is vacuum insulated. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
