PROCESS FOR TRANSFERRING FILM

摘要

PROBLEM TO BE SOLVED: To provide a process which prevents defects on a surface of an epitaxial grown layer from being brought to substrates stuck to each other.

SOLUTION: The process of transferring a layer of a first material from a first substrate 4 having defects in a zone close to the surface, onto a host substrate 20 made of a second material includes: (a) a step of thinning the first substrate in order to form a first thinned substrate 24; (b) a step of implanting ion or atom in the first substrate in order to form an implantation plane 6 therein and delimiting the layer to be transferred; and (c) a step of transferring the layer onto the host substrate 20 by fracturing the substrate along the implantation plane. This process allows production of substrates stuck to each other without defects.

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