| 摘要 |
PROBLEM TO BE SOLVED: To prevent flux deposited on the inner surface of a blower case from hanging down onto a substrate to be heated. SOLUTION: The flux (M1) is deposited on the inner surface of the lateral wall of the blower case (40). A round drain hole (or slotted hole) (65) is formed in the top face of a furnace body in the vicinity of the lateral wall, while a piping (66) with the hole (65) as its opened end is installed. The piping (66) is extended out to the exterior of an upper furnace body (15), and the flux flowing out through the piping (66) in the exterior is supplied to a collection vessel. The flux hung out downward from the blower is made to flow downward along the plate surface of an inclined plate (36a) of a baffle plate (17b), and streams into a gutter (36b) to be pooled therein. In addition, a recessed section (72) is formed on the top of a panel (191), and the flux (M3) that is hung down onto the panel (191) is pooled in the recessed section (72), so that the flux is prevented from hanging down onto an object to be heated (W), and the flux pooled in the recessed section (72) can be collected for recycling. COPYRIGHT: (C)2009,JPO&INPIT |
