| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam tomography method capable of obtaining a three-dimensionally reconstituted image of high precision by improving precision of information related to a projection direction of a sample, and to provide an electron beam tomography apparatus. SOLUTION: A transmission electron image is obtained by radiating the electron beam to an evaluation site of the sample having the evaluation site where the structure is to be evaluated, and a single crystal site integrally joined with the evaluation site, and the electron beam diffraction image is obtained by radiating the electron beam to the single crystal site without changing a radiation angle of the electron beam. The operation is carried out by a plurality of angles, a series of transmission electron images and the electron beam diffraction images are obtained, and based on the electron beam diffraction image, the projection direction for each of the series of the transmission electron images is decided. Based on the projection direction obtained by the method, positioning of the series of the transmission electron is carried out, and reconstituting calculation of a three-dimensional structure of the evaluation site is carried out. COPYRIGHT: (C)2009,JPO&INPIT
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