EXCIMER LAMP, ITS MANUFACTURING METHOD, AND LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an excimer lamp for radiating high output excimer lamp, and its manufacturing method, and a light source. SOLUTION: The excimer lamp and the method for manufacturing the excimer lamp are characterized by that the excimer lamp includes a discharge vessel containing discharge gas therein, and a plurality of electrodes for applying a voltage to the discharge gas. Concentration of residual air in the discharge vessel is 2500 ppb or less. The manufacturing method of the excimer lamp is characterized by that the discharge gas is filled after the concentration of the residual air in the discharge vessel is controlled to be 2500 ppb or less in a state that the discharge gas is filled. The light source is characterized by the excimer lamp and a power supply for applying a high frequency voltage on a plurality of electrodes for forming the excimer lamp. COPYRIGHT: (C)2009,JPO&INPIT