| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet lamp with ultraviolet reflecting film in which coupling force of the ultraviolet dispersion particles constituting the ultraviolet reflecting film is improved, the ultraviolet reflecting film hardly comes off even if an impact is applied, and even if it comes off, the ultraviolet dispersion particles are not separated and scattered, an excimer lamp and a method for manufacturing the excimer lamp. SOLUTION: The excimer lamp includes a discharge container 11 which includes a discharge space S and is made of silica glass, and a pair of electrodes 12, 13 interposed by silica glass to form the discharge container 11, and includes xenon gas filled in the discharge space S, and generates excimer discharge in the discharge space S of the discharge container 11. The ultraviolet lamp includes an ultraviolet reflecting film 14 consisting of ultraviolet dispersion particles containing silica particles and alkoxyl group resulting from a binder on the inner surface of the discharge container 11 exposed by discharge in the discharge space S. COPYRIGHT: (C)2009,JPO&INPIT
|
