| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device having high pattern defect detection accuracy. SOLUTION: This surface inspection device 100 has an illumination light source device 11 for irradiating light polarized in a prescribed direction to a substrate 14 to be inspected; an imaging element 19 for detecting a surface image of the substrate to be inspected by light reflected by the substrate to be inspected; an analyzer 17 arranged on the light incidence side of the imaging element, for transmitting polarized light in a direction approximately orthogonal to the prescribed direction; and reflecting mirrors 13, 15 arranged between the illumination light source device and the analyzer. In the device, the F-number to an effective light flux of the reflecting mirrors is 4.5 or higher. COPYRIGHT: (C)2009,JPO&INPIT
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