发明名称 |
Apparatus for pulling single crystal by CZ method |
摘要 |
In a Czochralski (CZ) single crystal puller equipped with a cooler and a thermal insulation member, which are to be disposed in a CZ furnace, smooth recharge and additional charge of material are made possible. Further, elimination of dislocations from a silicon seed crystal by use of the Dash's neck method can be performed smoothly. To these ends, there is provided a CZ single crystal puller, wherein a cooler and a thermal insulation member are immediately moved upward away from a melt surface during recharge or additional charge of material or during elimination of dislocations from a silicon seed crystal by use of the Dash's neck method.
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申请公布号 |
US2009173272(A1) |
申请公布日期 |
2009.07.09 |
申请号 |
US20080317695 |
申请日期 |
2008.12.23 |
申请人 |
KOMATSU DENSHI KINOZOKU KABUSHIKI KAISHA |
发明人 |
INAGAKI HIROSHI;KAWASHIMA SHIGEKI;KAMOGAWA MAKOTO;KOTOOKA TOSHIROU;SAISHOJI TOSHIAKI;EBI DAISUKE;NAKAMURA KENTARO;HAYASHI KENGO;HIRAISHI YOSHINOBU;MORIMOTO SHIGEO;MONDEN HIROSHI;HANAMOTO TADAYUKI;HATA TADASHI |
分类号 |
C30B15/00;C30B15/14;C30B15/30;C30B21/06;C30B27/02;C30B28/10;C30B30/04;F28D15/00 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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